The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2009
Filed:
Nov. 08, 2006
Hiroshi Tanaka, Tosu, JP;
Hidetoshi Nakao, Tosu, JP;
Naoki Shindo, Nirasaki, JP;
Atushi Yamashita, Nirasaki, JP;
Tsukasa Hirayama, Tosu, JP;
Kotaro Tsurusaki, Tosu, JP;
Hiroshi Tanaka, Tosu, JP;
Hidetoshi Nakao, Tosu, JP;
Naoki Shindo, Nirasaki, JP;
Atushi Yamashita, Nirasaki, JP;
Tsukasa Hirayama, Tosu, JP;
Kotaro Tsurusaki, Tosu, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
The present invention provides a drying apparatus capable of satisfactorily drying a workpiece by using a dry vapor The drying apparatus has a control device for controlling a supply of a carrier gas and a supply of a dry vapor into a processing tank holding workpieces. A drying process carries out a carrier gas supply step of supplying the carrier gas and a mixed fluid supply step of supplying a mixed fluid prepared by mixing the carrier gas and the dry vapor alternately. A total mixed fluid supply time for which the mixed fluid supply step is executed is not shorter than 57% of a total processing time for which the carrier gas supply step and the mixed fluid supply step are executed.