The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 19, 2022
Filed:
Jan. 30, 2018
Tokyo Electron Limited, Tokyo, JP;
Koji Tanaka, Koshi, JP;
Toshiyuki Shiokawa, Koshi, JP;
Koji Yamashita, Koshi, JP;
Hiroyuki Masutomi, Koshi, JP;
Hitoshi Kosugi, Koshi, JP;
Takao Inada, Koshi, JP;
Takashi Ikeda, Koshi, JP;
Tsukasa Hirayama, Koshi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A substrate liquid treatment apparatus includes an inner tank configured to store a treatment liquid and having an upper opening, an outer tank disposed outside the inner tank, and a lid movable between a close position for closing the upper opening of the inner tank and an open position for opening the upper opening of the inner tank. The lid includes a main portion that covers the upper opening of the inner tank when the lid is positioned at the close position, and a splash shielding portion connected to the main portion. When the lid is positioned at the close position, the splash shielding portion extends from a position higher than an upper end of a side wall of the inner tank adjacent to the splash shielding portion to a position which is lower than the upper end of the side wall and which is on the outer tank side of the side wall.