Toshinari Arai

Title: Innovations of Toshinari Arai

Introduction

Toshinari Arai is a prominent inventor based in Yokohama, Japan. He has made significant contributions to the field of charged particle beam technology, holding a total of 10 patents. His work has been instrumental in advancing the capabilities of various imaging and processing technologies.

Latest Patents

One of his latest inventions is a focused charged particle beam apparatus. This apparatus includes a support that holds a substrate to be processed and a focused charged particle beam column equipped with a differential pumping device. The device is designed to be movable to a location facing a specific area of the process target surface of the substrate. The support only bears the periphery of the substrate while keeping it horizontal. A positive pressure chamber is located below the substrate, exerting positive pressure on the entire process target area to counteract deflection caused by the substrate's weight. Additionally, a local depressurizing mechanism is arranged in the positive pressure chamber, working to exert negative pressure on the lower surface of the substrate to cancel out the suction force created by the differential pumping device.

Another notable invention is a scanning exposure device. This device features a stage that supports a substrate, with a space provided between the stage surface and the substrate. A light source unit radiates light to a light irradiation area that extends in one direction above the substrate. The scanning device moves one or both of the stage and the light source unit relatively in a scanning direction that intersects the one direction. The stage includes a light shielding member that covers the space between the stage surface and the substrate at the end part of the stage.

Career Highlights

Toshinari Arai has worked with several notable companies, including V Technology Co., Ltd. and Sharp Corporation. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking technologies in the field.

Collaborations

Throughout his career, Arai has collaborated with esteemed colleagues such as Koichi Kajiyama and Michinobu Mizumura. These partnerships have fostered innovation and have led to the development of advanced technologies.

Conclusion

Toshinari Arai's contributions to the field of charged particle beam technology are significant and impactful. His inventions continue to influence the industry, showcasing his expertise and dedication to innovation.