The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 05, 2019
Filed:
Feb. 17, 2016
V Technology Co., Ltd., Kanagawa, JP;
Sharp Kabushiki Kaisha, Osaka, JP;
Yuji Yoshida, Kanagawa, JP;
Mineyuki Matsumoto, Kanagawa, JP;
Toshinari Arai, Kanagawa, JP;
Shigeki Tanaka, Osaka, JP;
Keita Katayose, Osaka, JP;
Hideyuki Suzuki, Osaka, JP;
Makoto Kanbe, Osaka, JP;
V TECHNOLOGY CO., LTD., Kanagawa, JP;
SHARP KABUSHIKI KAISHA, Osaka, JP;
Abstract
A scanning exposure device includes a stage that supports a substrate, wherein a space is provided between a stage surface and the substrate; a light source unit that radiates light to a light irradiation area that extends in one direction above the substrate; and a scanning device that moves one or both of the stage and the light source unit relatively in a scanning direction that intersects the one direction. The scanning device is provided with an acceleration zone from a position in which the stage and the light source unit are at a standstill to a position in which the substrate supported by the stage enters the light irradiation area. The stage comprises a light shielding member that covers the space between the stage surface and the substrate at an end part of the stage.