The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 2016
Filed:
Jan. 30, 2014
V Technology Co., Ltd., Yokohama-shi, JP;
Yoshiaki Nomura, Yokohama, JP;
Toshinari Arai, Yokohama, JP;
V TECHNOLOGY CO., LTD., Yokohama-shi, JP;
Abstract
An alignment correction method includes: the step of detecting coordinates of a first observation pointand a second observation pointset in advance on a substrate to be exposedthat is being scanned in a scanning direction A, in order to observe an alignment deviation of the substrate to be exposed; the step of computing a correction amount based on a deviation between the detected coordinates and a reference line set in advance according to the first observation pointand the second observation point; and the step of correcting alignment of a subsequent substrate to be exposedbased on the computed correction amount.