This inventor holds 10 USPTO granted patents and 1 EPO patent. Top assignee: Tokyo Electron Limited. Active years: 2014-2019.
Location History:
- Miyagi, JP (2014 - 2015)
- Hyogo, JP (2014 - 2015)
- Hwaseong-si, KR (2015 - 2017)
- Hwaseong, KR (2016 - 2017)
- Amagasaki, JP (2014 - 2019)
Company Filing History:
Years Active: 2014-2019
Title: The Innovations of Toshihisa Ozu
Introduction
Toshihisa Ozu is a prominent inventor based in Hwaseong, South Korea. He has made significant contributions to the field of plasma processing technology. With a total of 10 patents to his name, Ozu's work has had a considerable impact on the industry.
Latest Patents
Ozu's latest patents include a plasma processing apparatus and a plasma etching apparatus. These inventions aim to improve the uniformity of a plasma process on the surface of a substrate. In his plasma processing apparatus, the ratio between the amount of processing gas introduced to the center and the peripheral portions of the substrate is adjusted during the plasma process. This innovation helps reduce variations in etching rates between different areas of the substrate, thereby enhancing the overall uniformity of the plasma process. Additionally, he has developed a method for processing a base body that involves etching a second layer in a base body containing nickel and silicon, as well as silicon and nitrogen.
Career Highlights
Ozu is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at this organization has allowed him to further develop his innovative ideas and contribute to advancements in plasma processing technology.
Collaborations
Throughout his career, Ozu has collaborated with notable colleagues such as Tetsuya Nishizuka and Takashi Tsukamoto. These partnerships have fostered a creative environment that has led to the development of groundbreaking technologies.
Conclusion
Toshihisa Ozu's contributions to plasma processing technology exemplify the spirit of innovation. His patents and collaborative efforts continue to shape the future of the industry.