Toru Ishizuka

Title: **Innovations of Toru Ishizuka: A Pioneer in SOI Wafer Manufacturing**

Introduction

Toru Ishizuka is an accomplished inventor based in Takasaki, Japan, with a remarkable portfolio of 14 patents. He has significantly contributed to semiconductor technology, particularly in the manufacturing of bonded Silicon-On-Insulator (SOI) wafers. His innovative methods aim to improve the quality and efficiency of SOI wafer production, addressing critical challenges in the field.

Latest Patents

Ishizuka's latest patents outline sophisticated methods for manufacturing bonded SOI wafers. The first method details a process that begins with preparing a silicon single crystal wafer with a specific interstitial oxygen concentration. A silicon oxide film is then formed on the base wafer by heating it in an oxidizing atmosphere at a high temperature. This process minimizes the formation of oxide precipitates while preventing slip dislocation.

The second method also describes producing bonded SOI wafers by bonding a base wafer and a bond wafer, both made from silicon single crystals. This process involves treating the base wafer at a carefully controlled temperature to create a silicon oxide film, followed by bonding and thinning the combined structure to form the final SOI layer. Both patents showcase Ishizuka's dedication to advancing semiconductor fabrication techniques.

Career Highlights

Toru Ishizuka holds an influential position at Shin-Etsu Handotai Co., Ltd., a leading company in the production of silicon products. His contributions in developing innovative wafer manufacturing techniques have positioned him as a key player in the semiconductor industry. His work not only enhances the performance of SOI wafers but also contributes to the overall advancement of electronic device technology.

Collaborations

Throughout his career, Ishizuka has worked with notable colleagues such as Hiroji Aga and Norihiro Kobayashi. These collaborations have fostered a dynamic environment for innovation, allowing for the exchange of ideas that have led to breakthroughs in manufacturing processes and technologies in the semiconductor sector.

Conclusion

Toru Ishizuka's contributions to the field of semiconductor technology through his innovative methods of producing bonded SOI wafers highlight his significant role as an inventor. His achievements exemplify the importance of continuous innovation and collaboration in advancing technology, ensuring that the semiconductor industry keeps pace with the ever-growing demand for efficient and high-quality electronic components.