Tinghao Frank Wang

Title: **The Innovations of Tinghao Frank Wang: A Pioneer in Plasma Processing Technologies**

Introduction

Tinghao Frank Wang, based in Irvine, CA, is an accomplished inventor with a notable portfolio encompassing seven patents. His work primarily focuses on advancements in plasma processing technologies, particularly dealing with hardmask removal processes.

Latest Patents

One of Wang's latest innovations is the patent for a "Carbon containing hardmask removal process using sulfur containing process gas." This patent outlines an apparatus, systems, and methods for conducting efficient hardmask removal on a workpiece. The innovative process involves admitting a sulfur-containing gas into a plasma chamber, where an inductively coupled plasma source generates plasma. This plasma is then used to remove portions of the carbon containing hardmask, distinguishing itself by not using halogen containing gas. Additionally, this system features a grounded electrostatic shield to minimize capacitive coupling, enhancing the precision of plasma generation.

Another significant patent covers a "Pedestal assembly for plasma processing apparatus," which details an assembly designed for plasma processing apparatuses. This invention includes a processing chamber with a plasma source that induces plasma and a pedestal that supports a substrate during processing. A focus ring with uniformly spaced slots is also part of this innovation, contributing to the effectiveness of substrate treatment.

Career Highlights

Frank Wang's career has been marked by significant contributions to the field of plasma technology through his roles at leading companies. He has worked with Mattson Technology, Inc, and Newport Fab, LLC, where he honed his expertise in developing cutting-edge semiconductor manufacturing processes.

Collaborations

Throughout his career, Wang has collaborated with notable professionals in the industry, including Dieter Dornisch and David J. Howard. These partnerships have facilitated the sharing of knowledge and innovation, further enhancing the development of advanced plasma processing technologies.

Conclusion

Tinghao Frank Wang's contributions to the field of plasma processing and hardmask removal have solidified his reputation as a leading inventor. His innovative patents reflect a commitment to enhancing semiconductor manufacturing processes, making significant strides in the efficiency and effectiveness of these technologies.