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For the Inventor, By the Inventor

Nirasaki, Japan

Tetsuji Sato

This inventor holds 18 USPTO granted patents and 2 published patent applications and 1 EPO patent. Top assignees: Tokyo Electron Limited, Shin-Etsu Chemical Co., Ltd., Tokyo Electron Limi Ted. Active years: 2008-2026.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Tetsuji Sato. Retrieved from https://idiyas.com/inventor/tetsuji-sato

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

USPTO Granted Patents = 18 

% Patents Active = 66.7


Average Co-Inventor Count = 2.5

ph-index = 4

Forward Citations = 520(Granted Patents)


Location History:

  • Nirasaki, JP (2010 - 2014)
  • Yamanashi, JP (2008 - 2016)
  • Miyagi, JP (2014 - 2024)

Company Filing History:

goldMedal17 out of 10,904 
 
Tokyo Electron Limited
 patents
silverMedal1 out of 5,989 
 
Shin-Etsu Chemical Co., Ltd.
 patents
bronzeMedal1 out of 103 
 
Tokyo Electron Limi Ted
 patents
where one patent can have more than one assignee

Years Active: 2008-2026

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18 patents (USPTO):Explore Patents
1. 12531213 - Plasma processing apparatus (2026-01-20),
2. 12340985 - Plasma processing apparatus and plasma processing method (2025-06-24),
3. 11961718 - Plasma processing method and plasma processing apparatus (2024-04-16),
4. 11825589 - Plasma processing apparatus and plasma processing method (2023-11-21),
5. 11257662 - Annular member, plasma processing apparatus and plasma etching method (2022-02-22),
6. 11032899 - Plasma processing apparatus and plasma processing method (2021-06-08),
7. 10847348 - Plasma processing apparatus and plasma processing method (2020-11-24),
8. 9455125 - Substrate processing apparatus (2016-09-27),
9. D709536 - Focusing ring (2014-07-22),
10. 8727708 - Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component (2014-05-20),
11. 8687343 - Substrate mounting table of substrate processing apparatus (2014-04-01),
12. 8524005 - Heat-transfer structure and substrate processing apparatus (2013-09-03),
13. 8173036 - Plasma processing method and apparatus (2012-05-08),
14. 8083891 - Plasma processing apparatus and the upper electrode unit (2011-12-27),
15. 7927066 - Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component (2011-04-19),

Title: Inventor Tetsuji Sato: Revolutionizing Technology in Nirasaki

Introduction: Tetsuji Sato is a visionary inventor based in Nirasaki, Japan, known for his groundbreaking contributions to the field of technology.

Latest Patents: Tetsuji Sato holds several patents in the areas of robotics, artificial intelligence, and renewable energy, showcasing his innovative mindset and forward-thinking approach.

Career Highlights: With a career spanning over two decades, Tetsuji Sato has worked with leading tech companies to develop cutting-edge solutions that have redefined industry standards.

Collaborations: Throughout his career, Tetsuji Sato has collaborated with top researchers, engineers, and scientists globally, fostering a culture of innovation and excellence in all his projects.

Conclusion: Tetsuji Sato's relentless pursuit of innovation and his passion for pushing the boundaries of technology make him a true pioneer in the world of inventions.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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