Tokyo-to, Japan

Takayuki Niuya


Average Co-Inventor Count = 5.5

ph-index = 5

Forward Citations = 85(Granted Patents)


Location History:

  • Ibaraki-ken, JP (2001)
  • Minato-Ku, JP (2002)
  • Tokyo-To, JP (2003 - 2005)
  • Ibaraki, JP (2003 - 2005)
  • Tsukuba, JP (2005)

Company Filing History:


Years Active: 2001-2005

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7 patents (USPTO):Explore Patents

Title: The Innovative Mind of Takayuki Niuya

Introduction

Takayuki Niuya, an accomplished inventor based in Tokyo-to, Japan, has made significant contributions to the field of semiconductor processing. With a total of 7 patents to his name, Niuya has developed innovative methods and apparatus that have the potential to advance the industry further.

Latest Patents

Among his latest patents are two groundbreaking inventions. The first is a **substrate processing method and substrate processing apparatus**, which focuses on the efficient removal of resist films and polymer layers from semiconductor substrates. This method utilizes a first processing liquid, generally containing an oxidizing agent such as hydrogen peroxide solution, to alter the conditions of the resist film and polymer layer. Following this, a second processing liquid, which usually combines dimethyl sulfoxide and an amine solvent, is applied to dissolve and lift off the unwanted materials from the substrate. This method also facilitates the removal of sputtered copper particles embedded in the polymer layer.

The second patent is a **cleaning agent and cleaning method** designed to maintain the integrity of materials during surface treatment. This cleaning agent is composed of a surfactant and an organic solvent, and the method involves flowing the cleaning agent across the material's surface at high speeds. This process effectively removes firmly adhered deposits without inflicting damage on the target material.

Career Highlights

Throughout his career, Takayuki Niuya has worked with notable companies such as Tokyo Electron Limited. His innovative approaches have allowed him to play a pivotal role in developing technologies that have a lasting impact on semiconductor processing and materials science.

Collaborations

Niuya has collaborated with esteemed colleagues including Hideto Gotoh and Hiroyuki Mori, each bringing their expertise to the table and contributing to the advancement of their respective projects. These collaborations have further enhanced the innovation landscape within which Niuya operates.

Conclusion

Takayuki Niuya stands out as a prominent figure in the field of semiconductor technology. With his impressive portfolio of patents and the strategic partnerships he has formed, Niuya continues to drive innovation forward, setting the stage for the next generation of advancements in the industry. His work not only benefits his immediate environment but also contributes to the global technological progression.

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