The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 05, 2005
Filed:
Oct. 09, 2001
Hideto Gotoh, Ibaraki, JP;
Takayuki Niuya, Ibaraki, JP;
Hiroyuki Mori, Yamanashi, JP;
Hiroshi Matsunaga, Ibaraki, JP;
Fukusaburo Ishihara, Saitama, JP;
Yoshiya Kimura, Ibaraki, JP;
Ryuji Sotoaka, Ibaraki, JP;
Takuya Goto, Ibaraki, JP;
Tetsuo Aoyama, Niigata, JP;
Kojiro Abe, Niigata, JP;
Hideto Gotoh, Ibaraki, JP;
Takayuki Niuya, Ibaraki, JP;
Hiroyuki Mori, Yamanashi, JP;
Hiroshi Matsunaga, Ibaraki, JP;
Fukusaburo Ishihara, Saitama, JP;
Yoshiya Kimura, Ibaraki, JP;
Ryuji Sotoaka, Ibaraki, JP;
Takuya Goto, Ibaraki, JP;
Tetsuo Aoyama, Niigata, JP;
Kojiro Abe, Niigata, JP;
Tokyo Electron Limited, Tokyo, JP;
Mitsubishi Gas Chemical Company, Inc., Tokyo, JP;
Abstract
The cleaning agent described above comprises a surfactant and an organic solvent, and the cleaning method described above is characterized by allowing the cleaning agent described above to flow on the surface of the material to be treated at a high speed to thereby clean the above surface. According to the present invention, deposits adhering firmly to a surface of a material to be treated can readily be removed without damaging the material to be treated.