The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 12, 2002
Filed:
Aug. 07, 2000
Takayuki Niuya, Minato-Ku, JP;
Michihiro Ono, Singapore, SG;
Hideto Gotoh, Minato-Ku, JP;
Hiroyuki Mori, Nirasaki, JP;
Tokyo Electron Limited, Tokyo-to, JP;
Abstract
There is provided a cleaning device capable of preventing a metal wiring layer or the like of an object to be treated, from being oxidized. The cleaning device comprises: a cleaning container having a treating space S having a slightly larger volume than that of an object W to be treated; a fluid storage tank for storing a cleaning fluid for treating the object; supply lines A through D for supplying the cleaning fluid from the fluid storage tank to the cleaning container; and reflux lines A through D for returning the cleaning fluid from the cleaning container to the fluid storage tank, wherein the cleaning container, the fluid storage tank, the supply lines and the reflux lines are associated with each other for forming closed cleaning fluid circulating lines A through D. Thus, it is possible to prevent the metal wiring layer or the like of the object from being oxidized.