Location History:
- Osaka, JP (2011)
- Ohtsu, JP (2007 - 2014)
- Otsu, JP (2012 - 2014)
Company Filing History:
Years Active: 2007-2014
Title: **Takatoshi Yamada: Innovator in Semiconductor Polishing Technology**
Introduction
Takatoshi Yamada, based in Ohtsu, Japan, is a renowned inventor with a significant contribution to the semiconductor industry. With a remarkable portfolio of 17 patents, Yamada has focused primarily on innovations that enhance polishing technologies for semiconductor devices.
Latest Patents
Among his latest innovations is a series of patents related to polishing pads and methods for producing semiconductor devices. His inventions include a polishing pad that allows for highly precise optical endpoint sensing during the polishing process, thereby achieving superior polishing characteristics such as surface uniformity and in-plane uniformity. Yamada’s first patent presents a polishing pad featuring a light-transmitting region with a transmittance of no less than 50% across a wavelength range of 400 to 700 nm. Another patent introduces a pad with a light-transmitting region, having a thickness between 0.5 to 4 mm and a transmittance of at least 80% over 600 to 700 nm. A further innovation by Yamada describes a polishing pad where the light-transmitting region is strategically located between the central and peripheral portions, with a diametrical length three times longer than its circumferential length. Additionally, his polishing pad is designed to minimize surface scratches while maintaining excellent planarization, ensuring a high polishing rate without clogging issues even with prolonged use.
Career Highlights
Yamada's career is marked by his tenure at Toyo Tire & Rubber Co., Ltd., where he has played a crucial role in advancing polishing technology. His inventive spirit and dedication have not only positioned him as a prominent figure in the materials science community but have also contributed to significant technological advancements in the semiconductor manufacturing process.
Collaborations
Throughout his career, Takatoshi Yamada has collaborated with notable colleagues, including Masahiko Nakamori and Tetsuo Shimomura. These partnerships have fostered an environment of innovation and shared expertise, enhancing the development of advanced polishing technologies in the semiconductor field.
Conclusion
In conclusion, Takatoshi Yamada's innovative contributions to semiconductor polishing processes are a testament to his expertise and dedication as an inventor. His continuous quest for improvement in polishing pads showcases the importance of innovation in maintaining the effectiveness and efficiency of semiconductor device fabrication.