Location History:
- Mie, JP (2007 - 2009)
- Yokkaichi, JP (2001 - 2017)
Company Filing History:
Years Active: 2001-2017
Title: Takanori Matsumoto: Innovator in Semiconductor Technology
Introduction
Takanori Matsumoto is a prominent inventor based in Yokkaichi, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 13 patents. His innovative approaches have paved the way for advancements in manufacturing processes and device efficiency.
Latest Patents
One of Matsumoto's latest patents is focused on a semiconductor device and method of manufacturing the same. In this embodiment, the method includes forming first patterns on a workpiece layer and creating second patterns containing a first metal on the side faces of the first patterns. The process further involves removing the first patterns after forming the second patterns and forming third patterns on the side faces of the second patterns through a chemical change of the first metal. Additionally, the method includes removing the second patterns after forming the third patterns and processing the workpiece layer using the third patterns as a mask. Another notable patent is the deposit removal method, which involves preparing a substrate with a pattern on which a deposit is deposited. This method includes exposing the substrate to a first atmosphere containing hydrogen fluoride gas, followed by exposure to oxygen plasma while heating, and finally, a second exposure to hydrogen fluoride gas to remove the deposit.
Career Highlights
Throughout his career, Takanori Matsumoto has worked with esteemed companies such as Kabushiki Kaisha Toshiba and Tokyo Electron Limited. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking advancements in semiconductor technology.
Collaborations
Matsumoto has collaborated with notable colleagues, including Satoshi Shimonishi and Hiroaki Tsunoda. These partnerships have fostered a creative environment that has led to innovative solutions in their field.
Conclusion
Takanori Matsumoto's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the industry. His work continues to influence advancements in manufacturing processes and device efficiency.