Taipei, Taiwan

Szu-Ping Tung

This inventor holds 38 USPTO granted patents and 7 published patent applications, primarily in Semiconductor Fabrication. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2015-2026.

USPTO Granted Patents = 38 

% Patents Active = 84.2

Average Co-Inventor Count = 4.0

ph-index = 5

Forward Citations = 68(Granted Patents)


Company Filing History:


Years Active: 2015-2026

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Areas of Expertise:
Semiconductor Devices
Interconnect Structures
Memory Device
Etch Stop Layer
Patterning Material
Film Deposition
Non-Uniform Stress
Metal Capping Process
Self-Aligned Repairing
Barrier Layer
MRAM Device
Thin-Film Evaluation
38 patents (USPTO):Explore Patents

Title: Innovator Spotlight: Szu-Ping Tung

Introduction: Szu-Ping Tung, based in Taipei, Taiwan, is an accomplished inventor in the semiconductor industry, holding a remarkable total of 34 patents. His expertise and innovation have significantly contributed to advancements in semiconductor fabrication techniques.

Latest Patents: Tung's latest patents include groundbreaking methods that enhance the efficiency and performance of semiconductor devices. One such patent focuses on a "Patterning material including silicon-containing layer and method for semiconductor device fabrication." This innovative method utilizes lithography patterning, providing a substrate and forming a target layer, followed by a carefully engineered patterning layer consisting of an organic composition and a silicon-rich layer. The second significant patent, "Method of forming an interconnect structure having an air gap and structure thereof," presents a unique approach to isolating conductive structures within a dielectric layer through the implementation of an air gap.

Career Highlights: Szu-Ping Tung has made significant contributions while working at Taiwan Semiconductor Manufacturing Company Ltd. His work not only emphasizes cutting-edge technologies but also showcases a deep understanding of semiconductor processes and materials.

Collaborations: Throughout his career, Tung has collaborated with notable colleagues, including Chih-Chien Chi and Huang-Yi Huang. Their joint efforts have fostered an environment of innovation, further pushing the boundaries of semiconductor technology.

Conclusion: Szu-Ping Tung is a leading figure in the field of semiconductor innovation, with a wealth of patents underscoring his dedication and expertise. His contributions are instrumental in shaping the future of semiconductor devices, ensuring that advancements in technology continue to benefit the industry and society as a whole.

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