Burlington, MA, United States of America

Steven Donnell

USPTO Granted Patents = 7 

 

Average Co-Inventor Count = 5.0

ph-index = 2

Forward Citations = 14(Granted Patents)


Company Filing History:


Years Active: 2014-2025

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7 patents (USPTO):

Title: The Innovations of Steven Donnell

Introduction

Steven Donnell is a notable inventor based in Burlington, MA (US), recognized for his contributions to the field of electrostatic chucks. With a total of seven patents to his name, Donnell has made significant advancements in technology that support workpiece processing.

Latest Patents

Among his latest patents is the "Electrostatic chuck with a charge dissipation structure." This invention describes electrostatic chucks that are useful for supporting a workpiece during processing. The design includes a pattern of charge dissipation lines on an insulating layer, featuring both a first and a second conductive layer. These lines are arranged to define enclosed fields of the insulating layer between them. Another notable patent is the "Electrostatic chuck having a gas flow feature, and related methods." This invention focuses on electrostatic chucks designed to support a workpiece during processing, incorporating a gas flow system to enhance functionality.

Career Highlights

Throughout his career, Steven Donnell has worked with prominent companies such as Entegris, Inc. and Varian Semiconductor Equipment Associates, Inc. His experience in these organizations has contributed to his expertise in the development of innovative technologies.

Collaborations

Donnell has collaborated with talented individuals in his field, including Yan Liu and Jakub Rybczynski. These partnerships have likely fostered a creative environment that encourages innovation and the sharing of ideas.

Conclusion

Steven Donnell's work in the field of electrostatic chucks showcases his innovative spirit and dedication to advancing technology. His patents reflect a commitment to improving workpiece processing methods, making him a significant figure in his industry.

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