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Billerica, MA, United States of America

Entegris, Inc.

USPTO Granted Patents = 787

EPO Patents = 147

Trademarks = 86

Forward Citations = 4,916

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672 inventors (with patents filed for the assignee):

Thomas H Baum (56 out of 257 patents)

Bryan Clark Hendrix (44 out of 95 patents)

Matthew A Fuller (42 out of 42 patents)

4. Joseph D Sweeney (36 out of 55 patents)

5. Emanuel Israel Cooper (33 out of 71 patents)

6. Barry Lee Gregerson (32 out of 62 patents)

7. Mark Vincent Smith (30 out of 34 patents)

8. George Gonnella (30 out of 33 patents)

9. Oleg Byl (27 out of 33 patents)

10. John Burns (25 out of 35 patents)

11. James Cedrone (24 out of 24 patents)

12. John A Leys (23 out of 25 patents)

13. Ying Tang (23 out of 27 patents)

14. Russ V Raschke (23 out of 23 patents)

15. Robert F McLoughlin (22 out of 29 patents)

Core Competencies:

CMP Cleaning Composition

Molybdenum Etching Inhibitor

Pressure Regulator

Storage Vessels

Metal-Organic Frameworks

Ion Implantation Systems

Gas Storage Systems

Optical Sensor Cleaning

Porous Membranes

Electrostatic Chucks

Silicon Precursor Compounds

Tungsten Deposition Process

787 patents: Sort by Forward Citations

1. 12502664 - Membranes for acid-sensitive solvents (2025-12-23),

2. 12500109 - Electrostatic chuck that includes upper ceramic layer that includes a dielectric layer, and related methods and structures (2025-12-16),

3. 12492471 - Precursor delivery systems for determining material levels (2025-12-09),

4. 12486581 - Cleaning composition with molybdenum etching inhibitor (2025-12-02),

5. 12486473 - Post CMP cleaning composition (2025-12-02),

6. 12482628 - Chlorine-containing precursors for ion implantation systems and related methods (2025-11-25),

7. 12480623 - Pressure regulator (2025-11-25),

8. 12480209 - Vaporization vessel and method (2025-11-25),

9. 12479028 - Metal-organic-framework-containing bodies and related methods (2025-11-25),

10. 12474236 - Multistage gas sampling trap and detection of sulfurous species contaminant (2025-11-18),

11. 12472450 - Filter apparatus with vented core (2025-11-18),

12. 12469728 - Manifold for a substrate container (2025-11-11),

13. 12460296 - Gas diffuser housings, devices, and related methods (2025-11-04),

14. 12459824 - Method of preparing iodosilanes and compositions therefrom (2025-11-04),

15. 12453942 - Porous poly (cyclic olefin) membranes (2025-10-28),

Entegris, Inc. is a global leader in contamination control, advanced materials, and specialty chemicals solutions for the microelectronics industry. The company offers products and materials used in wafer fabrication, packaging, and testing processes. With a focus on ensuring the integrity of materials throughout the semiconductor manufacturing process, Entegris helps customers improve yields, reduce defects, and increase productivity. Their innovative solutions enable the development of smaller, faster, and more advanced electronic devices.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Dec 30 2025

787 Patents

#1 in Billerica, MA

#38 in Massachusetts

#624 in US

#1,238 in the World

Billerica, MA, United States of America

Entegris, Inc.

Forward Citations = 4,916

672 inventors:

Thomas H Baum (56 out of 257 patents)

Bryan Clark Hendrix (44 out of 95 patents)

Matthew A Fuller (42 out of 42 patents)

4. Joseph D Sweeney (36 out of 55 patents)

5. Emanuel Israel Cooper (33 out of 71 patents)

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