For the Inventor, By the Inventor

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Billerica, MA, United States of America

Entegris, Inc.

USPTO Granted Patents = 841

% Expired Patents = 13.6

EPO Patents = 157

Trademarks = 73

Forward Citations = 5,115

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716 inventors (with patents filed for the assignee):

Thomas H Baum (57 out of 258 patents)

Matthew A Fuller (49 out of 49 patents)

Bryan Clark Hendrix (48 out of 99 patents)

4. Barry Lee Gregerson (36 out of 66 patents)

5. Joseph D Sweeney (36 out of 55 patents)

6. Mark Vincent Smith (33 out of 37 patents)

7. Emanuel Israel Cooper (33 out of 71 patents)

8. George Gonnella (30 out of 33 patents)

9. Russ V Raschke (28 out of 28 patents)

10. Oleg Byl (27 out of 33 patents)

11. John Burns (25 out of 35 patents)

12. John A Leys (24 out of 25 patents)

13. James Cedrone (24 out of 24 patents)

14. Shawn D Eggum (24 out of 28 patents)

15. Ying Tang (23 out of 27 patents)

Core Competencies:

EUV Lithography

Semiconductor Fabrication

Cleaning Compositions

Filter Media

Precursor Delivery Systems

Electrostatic Chuck

Gas-Processing Systems

Porous Membranes

Reticle Pods

Etching Compositions

Additive Manufacturing

Wafer Containers

841 patents: Sort by Forward Citations

1. 12767415 - Wafer container and purge system (2026-10-20),

2. D1152784 - Breakseal for a chemical container (2026-10-13),

3. 12760129 - Oleophobic fluoropolymers and fibrous materials prepared therefrom (2026-10-13),

4. 12758921 - Fluorinated filter membrane, filters, and methods (2026-10-13),

5. 12758907 - Purge port filter support (2026-10-13),

6. 12758903 - Filter cartridge, and method of retrofitting filter housing (2026-10-13),

7. D1151160 - Spacer applied to reticle container (2026-10-06),

8. 12757679 - Electrostatic chuck and related methods and structures (2026-10-06),

9. 12753198 - Precursors containing fluorinated alkoxides and amides (2026-10-06),

10. 12751245 - Purge flow distribution system for a substrate container and method for performing the same (2026-09-29),

11. 12747160 - Method for purifying iodosilanes (2026-09-29),

12. 12742097 - Compositions for polishing hardmasks and related systems and methods (2026-09-22),

13. 12740558 - Bag holder for blast freezing (2026-09-22),

14. 12734488 - Point of use or point of dispense filter with multiple pleat packs (2026-09-15),

15. 12730371 - Extreme ultraviolet inner pod seal gap (2026-09-08),

Company Overview

Entegris, Inc., headquartered in Billerica, MA, specializes in advanced materials and process solutions for the semiconductor fabrication industry. The company develops a range of technologies including EUV lithography, cleaning compositions, and gas-processing systems, aimed at enhancing the efficiency and reliability of semiconductor manufacturing. Entegris is recognized for its expertise in filter media, precursor delivery systems, electrostatic chucks, and porous membranes, contributing to the innovation and performance of critical manufacturing processes.

Profile summary synthesized from public USPTO records and patent filings.

Company Badge

USPTO Data Jan 1 1976 - Oct 20 2026

841 Patents

#1 in Billerica, MA

#33 in Massachusetts

#610 in US

#1,201 in the World

Billerica, MA, United States of America

Entegris, Inc.

Forward Citations = 5,115

716 inventors:

Thomas H Baum (57 out of 258 patents)

Matthew A Fuller (49 out of 49 patents)

Bryan Clark Hendrix (48 out of 99 patents)

4. Barry Lee Gregerson (36 out of 66 patents)

5. Joseph D Sweeney (36 out of 55 patents)

IDiyas Innovation Intelligence. (2026). Company Patent Portfolio: Entegris, Inc.. Retrieved from https://idiyas.com/company/entegris

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]

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