The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 27, 2017
Filed:
Sep. 08, 2011
David Suuronen, Newburyport, MA (US);
Lyudmila Stone, Lynnfield, MA (US);
Julian Blake, Gloucester, MA (US);
Dale K. Stone, Lynnfield, MA (US);
Richard A. Cooke, Framingham, MA (US);
Steven Donnell, Burlington, MA (US);
Chandra Venkatraman, Tyngsboro, MA (US);
David Suuronen, Newburyport, MA (US);
Lyudmila Stone, Lynnfield, MA (US);
Julian Blake, Gloucester, MA (US);
Dale K. Stone, Lynnfield, MA (US);
Richard A. Cooke, Framingham, MA (US);
Steven Donnell, Burlington, MA (US);
Chandra Venkatraman, Tyngsboro, MA (US);
Entegris, Inc., Billerica, MA (US);
Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (US);
Abstract
In accordance with an embodiment of the invention, there is provided an electrostatic chuck comprising a conductive path covering at least a portion of a workpiece-contacting surface of a gas seal ring of the electrostatic chuck, the conductive path comprising at least a portion of an electrical path to ground; and a main field area of a workpiece-contacting surface of the electrostatic chuck comprising a surface resistivity in the range of from about 10to about 10ohms per square.