The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 04, 2014
Filed:
May. 13, 2010
Richard A. Cooke, Framingham, MA (US);
Nate Richard, Peabody, MA (US);
Steven Donnell, Burlington, MA (US);
Mark Vose, Windham, NH (US);
Yan Liu, Arlington, MA (US);
Richard A. Cooke, Framingham, MA (US);
Nate Richard, Peabody, MA (US);
Steven Donnell, Burlington, MA (US);
Mark Vose, Windham, NH (US);
Yan Liu, Arlington, MA (US);
Entegris, Inc., Billerica, MA (US);
Abstract
In accordance with an embodiment of the invention, there is provided an electrostatic chuck. The electrostatic chuck comprises a surface layer activated by a voltage in an electrode to form an electric charge to electrostatically clamp a substrate to the electrostatic chuck. The surface layer includes a plurality of polymer protrusions and a charge control layer to which the plurality of polymer protrusions adhere, the plurality of polymer protrusions extending to a height above portions of the charge control layer surrounding the plurality of polymer protrusions to support the substrate upon the plurality of polymer protrusions during electrostatic clamping of the substrate.