Cupertino, CA, United States of America

Son Trinh

USPTO Granted Patents = 12 

 

Average Co-Inventor Count = 5.4

ph-index = 11

Forward Citations = 1,757(Granted Patents)


Company Filing History:


Years Active: 1999-2014

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12 patents (USPTO):

Title: Innovations by Inventor Son Trinh from Cupertino, CA

Introduction

Son Trinh is a prominent inventor based in Cupertino, California, known for his innovative contributions in the field of semiconductor manufacturing. With a remarkable portfolio comprising 12 patents, Trinh has made significant strides in developing methods for enhancing substrate processing and ensuring optimal fabrication processes in the technology sector.

Latest Patents

Trinh's latest patents include a "Method for Removing Oxides," which involves a unique process for eliminating native oxides from substrate surfaces. This method entails positioning the substrate in a processing chamber, applying a gas mixture to form a volatile film, and controlling the substrate temperature to facilitate oxide removal. The innovative approach maintains the substrate temperature below 65°C before applying heat to sublimate the film effectively.

Another noteworthy invention is the "Method for Front End of Line Fabrication." This patent presents a detailed process for removing native oxides from a silicon oxide substrate. The process includes the generation of a plasma of reactive species, temperature control to ensure effective reactions with silicon oxide, and the formation of a protective film that is subsequently removed by heating the substrate.

Career Highlights

Son Trinh is currently associated with Applied Materials, Inc., where he continues to work on advanced semiconductor processing technologies. His expertise in the field has positioned him as a key player in the innovation landscape, contributing to the ongoing progress in materials science and engineering.

Collaborations

Throughout his career, Trinh has collaborated with esteemed colleagues, including Chien-Teh Kao and Xiaoxiong (John) Yuan. These collaborations have led to fruitful discussions and developments in various projects, ultimately enhancing innovation in their shared field of interest.

Conclusion

Son Trinh's inventive spirit and technical knowledge have established him as a notable figure in semiconductor technology. His work not only reflects his ingenuity but also underscores the importance of ongoing research and innovation in the industry. With 12 patents to his name, Trinh continues to pave the way for future advancements, contributing significantly to the evolution of modern technology.

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