Company Filing History:
Years Active: 1999-2014
Title: Shosuke Endoh: Innovator in Plasma Processing Technology
Introduction
Shosuke Endoh is a prominent inventor based in Nirasaki, Japan. He has made significant contributions to the field of plasma processing technology, holding a total of 8 patents. His innovative designs and methods have advanced the efficiency and effectiveness of various processing systems.
Latest Patents
Endoh's latest patents include a range of groundbreaking inventions. One notable patent is a reflecting device that prevents the infiltration of particles into a processing chamber. This reflecting device is strategically placed in a communicating pipe, which connects the processing chamber of a substrate processing apparatus to an exhaust pump equipped with at least one rotary blade. The reflecting device features at least one reflecting surface oriented towards the exhaust pump. Another significant invention is a plasma processing apparatus that includes a focus ring, which greatly improves the cooling efficiency of the focus ring while maintaining cost-effectiveness. This apparatus consists of a susceptor with an electrostatic chuck, where a wafer is mounted for plasma processing. The focus ring is designed with both dielectric and conductive material portions to enhance its functionality.
Career Highlights
Throughout his career, Shosuke Endoh has worked with notable companies such as Tokyo Electron Limited and Tokai Carbon Company, Ltd. His experience in these organizations has allowed him to refine his skills and contribute to the development of advanced technologies in the field.
Collaborations
Endoh has collaborated with talented individuals in his field, including coworkers Shinji Himori and Tsuyoshi Moriya. These collaborations have fostered innovation and have led to the successful development of various technologies.
Conclusion
Shosuke Endoh's contributions to plasma processing technology and his innovative patents highlight his role as a key figure in the industry. His work continues to influence advancements in processing systems, showcasing the importance of innovation in technology.