The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2009
Filed:
Sep. 17, 2003
Jun Takeuchi, Toyonaka, JP;
Masaaki Kishida, Itami, JP;
Tadakazu Matsunaga, Takarazuka, JP;
Shosuke Endoh, Nirasaki, JP;
Jun Takeuchi, Toyonaka, JP;
Masaaki Kishida, Itami, JP;
Tadakazu Matsunaga, Takarazuka, JP;
Shosuke Endoh, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A method of forming a coating film of ceramic material on a surface of an internal member disposed in a vacuum processing apparatus, the surface of the internal member having holes formed therein. The method involves: (A) filling the holes of the internal member with padding plugs, each of which has a core member made from a metal material and a metal-resin composite layer covering the circumferential surface of the core member, the metal-resin composite layer being a complex composed of a metal material and a resinous material exhibiting nonconjugative property to a coating film; (B) forming a ceramic coating film on the surface of the internal member by plasma spraying after step (A); and (C) extracting the padding plugs out of the holes after step (B).