Shigeo Tokumitsu

Title: Shigeo Tokumitsu: Innovator in Semiconductor Technology

Introduction

Shigeo Tokumitsu is a prominent inventor based in Kanagawa, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 9 patents. His work has been instrumental in advancing the manufacturing processes and designs of semiconductor devices.

Latest Patents

Among his latest patents, Tokumitsu has developed a semiconductor device and a method of manufacturing the same. This method involves providing a substrate, forming a first opening, creating a first insulating layer, and forming a second opening. It also includes embedding a conductive layer, forming a protective layer, and performing chemical mechanical polishing (CMP). The substrate consists of a semiconductor substrate and a semiconducting layer, with the conductive layer embedded in the second opening to create a gap along the thickness direction of the semiconducting layer. The protective layer is formed in the second opening on at least a portion of the surfaces of the conductive layer, and during the CMP step, a portion of the conductive layers formed outside the second opening is removed.

Another notable patent is for a substrate contact plug, which connects to a wiring and a semiconductor substrate without forming a circuit. This plug is located in a seal ring region at the peripheral portion of a semiconductor chip region. The substrate contact plug is buried in a trench that is deeper than an element isolation trench, showcasing Tokumitsu's innovative approach to semiconductor design.

Career Highlights

Throughout his career, Shigeo Tokumitsu has worked with leading companies in the semiconductor industry, including Renesas Electronics Corporation and Renesas Technology Corporation. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking advancements in semiconductor technology.

Collaborations

Tokumitsu has collaborated with notable colleagues such as Tetsuya Nitta and Katsumi Morii. These partnerships have fostered an environment of innovation and creativity, leading to the development of cutting-edge technologies in the semiconductor field.

Conclusion

Shigeo Tokumitsu's contributions to semiconductor technology are significant and impactful. His innovative patents and collaborations with industry leaders highlight his role as a key figure in advancing this essential field. His work continues to influence the future of semiconductor manufacturing and design.