Location History:
- Sakura, JP (2002)
- Tokyo, JP (2005 - 2007)
- Minato-ku, JP (2007 - 2008)
- Chiba, JP (2013 - 2019)
Company Filing History:
7 out of 10,341 
1 out of 986 
1 out of 832,891 Years Active: 2002-2019
Title: Shigemi Murakawa: Innovator in Semiconductor Technology
Introduction
Shigemi Murakawa is a prominent inventor based in Minato-ku, Japan. She holds a total of 8 patents that contribute significantly to the fields of semiconductor technology and plasma processing. Her innovative work has paved the way for advancements in various applications, including liquid crystals, LEDs, and solar cells.
Latest Patents
One of her latest inventions is the Rotating Semi-Batch ALD Device. This device and process ensure high productivity, minimal particle formation, low gas consumption, and high coverage during the production of semiconductors. The design features a reaction gas supply system that includes a shower plate for even gas discharge and a cavity that allows gradual gas flow. Additionally, a purge gas supply system is configured to ensure even gas flow at high velocity in the narrow gap between the purge gas supply and the substrates being treated.
Another significant patent is the Microwave Plasma Processing Apparatus, which includes a dielectric window for use in the apparatus. This invention addresses the limitations of conventional microwave plasma processing by enabling the formation of oxide and nitride films with characteristics comparable to those obtained using rare gases. The dielectric window is enhanced with a planarization film that achieves a stoichiometric SiO composition through thermal treatment, resulting in a flat and dense surface.
Career Highlights
Shigemi Murakawa has worked with notable companies, including Tokyo Electron Limited. Her contributions to the field have been recognized for their impact on semiconductor manufacturing processes.
Collaborations
Throughout her career, she has collaborated with esteemed colleagues such as Toshio Nakanishi and Satoru Kawakami. These partnerships have further enriched her innovative endeavors.
Conclusion
Shigemi Murakawa's contributions to semiconductor technology and plasma processing exemplify her role as a leading inventor. Her patents reflect a commitment to advancing technology and improving manufacturing processes.