Company Filing History:
Years Active: 2007-2025
Title: The Innovative Contributions of Inventor Seokmin Yun
Introduction
Seokmin Yun, a prolific inventor based in Pleasanton, California, has made significant contributions to the field of semiconductor technology. With an impressive portfolio of 14 patents, his innovative work is essential in advancing etching and treatment methodologies within the industry.
Latest Patents
Among Seokmin Yun's latest patents is a groundbreaking invention titled "Method and Apparatus for Anisotropic Pattern Etching and Treatment." This patent discusses methods and apparatuses for providing an anisotropic ion beam for the etching and treatment of substrates. The invention encompasses a sophisticated processing system featuring a chamber, a chuck assembly, an ion source, and a grid system. The grid system plays a critical role by interfacing the ion source with the chamber and allowing ions to be extracted effectively to form an ion beam tailored for precise substrate support.
Another notable patent is the "Method of Dielectric Film Treatment." This innovation presents a method and system designed to clean a substrate's surface post-etching operation. By determining several process parameters tied to the substrate surface, it offers a range of application chemistries—one of which is an emulsion. This emulsion comprises two immiscible liquids and solid particles, significantly enhancing the cleaning process by eliminating particulate and polymer residue while preserving the substrate's essential characteristics.
Career Highlights
Seokmin Yun is currently associated with Lam Research Corporation, a prominent player in semiconductor manufacturing equipment. His work has been instrumental in the continuous improvement of etching processes, contributing to the efficiency and effectiveness of semiconductor fabrication.
Collaborations
Throughout his career, Seokmin has collaborated with several esteemed colleagues, including Mark Henry Wilcoxson and Ji Zhu. Together, they have exchanged ideas and expertise, driving innovation in their respective fields and enhancing their team's collective output.
Conclusion
Seokmin Yun exemplifies the spirit of innovation in the semiconductor industry. With his 14 patents and ongoing work at Lam Research Corporation, he continues to push the boundaries of technology, making substantial impacts on substrate processing and treatment methodologies. His collaborations and inventions are paving the way for future advancements, highlighting the importance of creativity and teamwork in driving technological progress.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.