The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2009
Filed:
Dec. 02, 2005
Seokmin Yun, Pleasanton, CA (US);
John M. Boyd, Hillsboro, OR (US);
John M. DE Larios, Palo Alto, CA (US);
Fritz Redeker, Fremont, CA (US);
Seokmin Yun, Pleasanton, CA (US);
John M. Boyd, Hillsboro, OR (US);
John M. de Larios, Palo Alto, CA (US);
Fritz Redeker, Fremont, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A method for cleaning an edge surface of a semiconductor substrate is disclosed. The proximity head unit is positioned so that the flow head portion and the collection head portion of the proximity head unit are proximate to the edge surface of the semiconductor substrate. The semiconductor substrate is then rotated using one or more powered rollers. During the rotation of the semiconductor substrate, the flow head portion applies a fluid to the edge surface while the collection head portion collects fluid from the edge surface. Additional methods, an apparatuses, and a system for cleaning an edge surface of a semiconductor substrate are also described.