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For the Inventor, By the Inventor

Monte Sereno, CA, United States of America

Rolf A Guenther

USPTO Granted Patents = 16 

Average Co-Inventor Count = 3.1

ph-index = 10

Forward Citations = 900(Granted Patents)


Company Filing History:

goldMedal15 out of 13,684 
 
Applied Materials, Inc.
 patents
silverMedal1 out of 8,033 
 
Westinghouse Electric Corporation
 patents

Years Active: 1987-2011

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16 patents (USPTO):
1. 8065789 - Method of fabricating a heated substrate support (2011-11-29),
2. 7674338 - Heated substrate support and method of fabricating same (2010-03-09),
3. 7354501 - Upper chamber for high density plasma CVD (2008-04-08),
4. 7294208 - Apparatus for providing gas to a processing chamber (2007-11-13),
5. 7074298 - High density plasma CVD chamber (2006-07-11),
6. 6916147 - Substrate storage cassette with substrate alignment feature (2005-07-12),
7. 6915592 - Method and apparatus for generating gas to a processing chamber (2005-07-12),
8. 6902947 - Integrated method for release and passivation of MEMS structures (2005-06-07),
9. 6900133 - Method of etching variable depth features in a crystalline substrate (2005-05-31),
10. 6830950 - Integrated method for release and passivation of MEMS structures (2004-12-14),
11. 6822185 - Temperature controlled dome-coil system for high power inductively coupled plasma systems (2004-11-23),
12. 6367410 - Closed-loop dome thermal control apparatus for a semiconductor wafer processing system (2002-04-09),
13. 5978202 - Electrostatic chuck having a thermal transfer regulator pad (1999-11-02),
14. 5893643 - Apparatus for measuring pedestal temperature in a semiconductor wafer (1999-04-13),
15. 5851926 - Method for etching transistor gates using a hardmask (1998-12-22),

Title: Rolf A. Guenther: Innovator in Substrate Support Technology

Introduction

Rolf A. Guenther is a notable inventor based in Monte Sereno, CA (US). He has made significant contributions to the field of substrate support technology, holding a total of 16 patents. His innovative methods have advanced the capabilities of substrate supports used in various applications.

Latest Patents

Among his latest patents, Guenther has developed a method of fabricating a heated substrate support. This method involves providing a body with a groove, inserting a heater element into the groove, and placing an insert and a cap into the groove. The heater element consists of a resistive element encased in a malleable cladding. Additionally, he has patented a heated substrate support and method of fabricating the same, which includes a body with a support surface and at least one groove. In this design, a heater element surrounded by a malleable heat sink is placed in the groove, with a cap positioned above the heat sink.

Career Highlights

Throughout his career, Rolf A. Guenther has worked with prominent companies such as Applied Materials, Inc. and Westinghouse Electric Corporation. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking technologies in the industry.

Collaborations

Guenther has collaborated with notable professionals in his field, including Jeffrey D. Chinn and Michael Rattner. These partnerships have fostered innovation and have been instrumental in the development of his patented technologies.

Conclusion

Rolf A. Guenther's contributions to substrate support technology through his patents and collaborations highlight his role as a significant inventor in the field. His work continues to influence advancements in technology and engineering.

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