The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 2005
Filed:
Oct. 25, 2002
Dongchoon Suh, Santa Clara, CA (US);
Wendell T. Blonigan, Union City, CA (US);
Rolf A. Guenther, Monte Sereno, CA (US);
Dongchoon Suh, Santa Clara, CA (US);
Wendell T. Blonigan, Union City, CA (US);
Rolf A. Guenther, Monte Sereno, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A substrate storage cassette and a method of orienting a substrate disposed therein are provided. In one embodiment, the substrate storage cassette includes a plurality of flanges pairs disposed between a first lateral sidewall coupled in a spaced-apart relation to a second lateral sidewall. Each of the flange pairs adapted to support a substrate thereon. At least a first alignment feature disposed between the flange pair and adapted to mate with an orientation feature of the substrate when the substrate is in a predefined orientation.