The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 13, 1999
Filed:
Mar. 25, 1997
Ajay Kumar, Sunnyvale, CA (US);
Jeffrey Chinn, Foster City, CA (US);
Shashank C Deshmukh, Sunnyvale, CA (US);
Weinan Jiang, San Jose, CA (US);
Brian Duda, San Jose, CA (US);
Rolf Guenther, Monte Sereno, CA (US);
Bruce Minaee, Campbell, CA (US);
Marco Mombelli, Santa Clara, CA (US);
Mark Wiltse, Redwood City, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Apparatus for measuring wafer support pedestal temperature in a semiconductor wafer processing system. The apparatus measures infrared energy emitted by the bottom of the pedestal via a tube having one end inserted in a bore through the underside of the cathode pedestal base. The distal end of the tube is coupled to a temperature sensor. Both the tube and temperature sensor are fitted with insulating sleeve adapters to suppress unwanted RF signals from coupling to the sensor.