Mark Wiltse

Title: Mark Wiltse: Innovator in Substrate Processing Technologies

Introduction

Mark Wiltse is a notable inventor based in Redwood City, CA (US). He has made significant contributions to the field of substrate processing, holding a total of 5 patents. His work focuses on developing innovative devices and methods that enhance the accuracy and efficiency of photolithographic processes.

Latest Patents

One of Wiltse's latest patents is a process condition measuring device. This instrument is designed to measure various parameters through a substrate that carries multiple sensors. These sensors are strategically distributed across the substrate's surface, allowing for precise measurements at different positions. The device includes an electronic processing component and electrical conductors that connect the sensors to the processing unit. Additionally, a cover is placed over the sensors and components, ensuring that the instrument mimics the properties of a production substrate. This allows for accurate characterization of a production wafer's behavior during substrate processing.

Another significant patent addresses temperature effects on overlay accuracy in photolithographic processes. This method involves providing a substrate with a permanent layer containing a first pattern. The substrate is then coated with photoresist and exposed to a second pattern while measuring temperatures at various positions. By correlating overlay errors with temperature data, adjustments can be made to improve the photolithographic process.

Career Highlights

Mark Wiltse has worked with prominent companies in the semiconductor industry, including Applied Materials, Inc. and KLA-Tencor Corporation. His experience in these organizations has allowed him to develop and refine his innovative ideas in substrate processing technologies.

Collaborations

Throughout his career, Wiltse has collaborated with talented professionals, including Ajay Kumar and Jeffrey D. Chinn. These partnerships have contributed to the advancement of his inventions and the overall progress in the field.

Conclusion

Mark Wiltse's contributions to substrate processing technologies through his patents and collaborations highlight his role as an influential inventor. His innovative approaches continue to impact the semiconductor industry positively.