The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2003
Filed:
Jul. 31, 2000
Danny Wang, San Jose, CA (US);
Dmitry Lubomirsky, Cupertino, CA (US);
Erwin Polar, San Jose, CA (US);
Brigitte Stoehr, San Jose, CA (US);
Mark Wiltse, Redwood City, CA (US);
Yeuk-Fai Edwin Mok, San Francisco, CA (US);
Frank C. Ma, Scotts Valley, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method and apparatus for supporting and transferring a substrate in a semiconductor wafer processing system. In one aspect, a support ring having one or more substrate support members mounted thereon and defining a central opening therein for receipt of a substrate support member during processing is disclosed. In another aspect, a substrate handler blade having a plurality of substrate supports disposed thereon is provided which is adapted to support a substrate thereon and effectuate substrate transfer between the substrate handler blade and the support ring.