Location History:
- Danvers, MA (US) (2017)
- Brookline, MA (US) (1997 - 2021)
Company Filing History:
14 out of 622 
11 out of 784 
1 out of 993 
Years Active: 1997-2021
Title: Robert E Kaim: Pioneering Innovations in Silicon and Carbon Implantation
Introduction
Robert E Kaim, based in Danvers, MA, is a prominent inventor with an impressive portfolio of 30 patents. His work revolves around advanced materials and ion implantation techniques, showcasing his significant contributions to semiconductor technology and materials science.
Latest Patents
Kaim's latest patents highlight his innovative approach to silicon and carbon implantation. One of his noteworthy patents, titled "Silicon implantation in substrates and provision of silicon precursor compositions therefor," describes compositions, systems, and methods for implanting silicon and/or silicon ions into substrates. This invention involves generating silicon and/or silicon ions from corresponding silicon precursor compositions and implanting them into the substrate, enhancing the efficiency of semiconductor fabrication.
Another groundbreaking patent by Kaim is "Carbon materials for carbon implantation." This patent outlines a method of implanting carbon ions into a target substrate by ionizing a carbon-containing dopant material to produce a plasma containing ions. The process can optionally involve co-flowing additional gases with the carbon material, significantly improving the efficiency of ion implanter tools. The carbon-containing dopant material is defined by a specific chemical formula, facilitating the use of various carbon sources.
Career Highlights
Throughout his career, Kaim has worked with leading companies in the technology sector, including Advanced Technology Materials, Inc. and Entegris, Inc. His role in these organizations has allowed him to apply his innovative concepts in real-world applications, driving advancements in material science and implantation techniques.
Collaborations
Kaim has collaborated with other experts in his field, including notable coworkers such as Joseph D Sweeney and Richard S Ray. These partnerships have contributed to the development of enhanced technologies and methodologies within the realm of semiconductor fabrication.
Conclusion
Robert E Kaim’s contributions to the fields of silicon and carbon implantation are invaluable, as evidenced by his numerous patents and collaborations. His innovative spirit continues to drive advancements in semiconductor technologies, making him a key figure in the landscape of modern materials science.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.