The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2015
Filed:
Dec. 03, 2013
Entegris, Inc., Billerica, MA (US);
Robert Kaim, Brookline, MA (US);
Joseph D. Sweeney, New Milford, CT (US);
Oleg Byl, Southbury, CT (US);
Sharad N. Yedave, Danbury, CT (US);
Edward E. Jones, Woodbury, CT (US);
Peng Zou, Ridgefield, CT (US);
Ying Tang, Brookfield, CT (US);
Barry Lewis Chambers, Midlothian, VA (US);
Richard S. Ray, New Milford, CT (US);
ENTEGRIS, INC., Billerica, MA (US);
Abstract
An isotopically-enriched, boron-containing compound comprising two or more boron atoms and at least one fluorine atom, wherein at least one of the boron atoms contains a desired isotope of boron in a concentration or ratio greater than a natural abundance concentration or ratio thereof. The compound may have a chemical formula of BF. Synthesis methods for such compounds, and ion implantation methods using such compounds, are described, as well as storage and dispensing vessels in which the isotopically-enriched, boron-containing compound is advantageously contained for subsequent dispensing use.