The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 13, 2021
Filed:
Aug. 14, 2014
Entegris, Inc., Billerica, MA (US);
Ying Tang, Brookfield, CT (US);
Joseph D. Sweeney, New Milford, CT (US);
Tianniu Chen, Westford, MA (US);
James J. Mayer, Fischer, TX (US);
Richard S. Ray, Phoenix, AZ (US);
Oleg Byl, Southbury, CT (US);
Sharad N. Yedave, Danbury, CT (US);
Robert Kaim, Brookline, MA (US);
Entegris, Inc., Billerica, MA (US);
Abstract
Compositions, systems, and methods are described for implanting silicon and/or silicon ions in a substrate, involving generation of silicon and/or silicon ions from corresponding silicon precursor compositions, and implantation of the silicon and/or silicon ions in the substrate.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile