The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 27, 2015

Filed:

Oct. 15, 2013
Applicant:

Entegris, Inc., Billerica, MA (US);

Inventors:

James Dietz, Allison Park, PA (US);

Steven E. Bishop, Corrales, NM (US);

James V. McManus, Bethel, CT (US);

Steven M. Lurcott, Deerfield Beach, FL (US);

Michael J. Wodjenski, New Milford, CT (US);

Robert Kaim, Brookline, MA (US);

Frank DiMeo, Jr., Falls Church, VA (US);

Assignee:

ENTEGRIS, INC., Billerica, MA (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01D 1/00 (2006.01); G01N 33/00 (2006.01); H01L 23/538 (2006.01); H01L 23/00 (2006.01); H01L 21/683 (2006.01); H01L 25/03 (2006.01); H01L 25/16 (2006.01); H05K 1/18 (2006.01); G01F 23/00 (2006.01); H01L 21/56 (2006.01); H01L 25/065 (2006.01); H05K 3/46 (2006.01);
U.S. Cl.
CPC ...
G01N 33/00 (2013.01); G01F 23/0076 (2013.01); H01L 21/568 (2013.01); H01L 21/6835 (2013.01); H01L 23/5389 (2013.01); H01L 24/24 (2013.01); H01L 24/82 (2013.01); H01L 25/03 (2013.01); H01L 25/16 (2013.01); H05K 1/185 (2013.01); H01L 21/561 (2013.01); H01L 24/48 (2013.01); H01L 25/0652 (2013.01); H01L 2224/16225 (2013.01); H01L 2224/16227 (2013.01); H01L 2224/24011 (2013.01); H01L 2224/2518 (2013.01); H01L 2224/48091 (2013.01); H01L 2224/48227 (2013.01); H01L 2924/014 (2013.01); H01L 2924/01005 (2013.01); H01L 2924/01006 (2013.01); H01L 2924/01013 (2013.01); H01L 2924/01023 (2013.01); H01L 2924/01027 (2013.01); H01L 2924/01033 (2013.01); H01L 2924/01058 (2013.01); H01L 2924/01076 (2013.01); H01L 2924/01078 (2013.01); H01L 2924/01082 (2013.01); H01L 2924/09701 (2013.01); H01L 2924/14 (2013.01); H01L 2924/19042 (2013.01); H05K 3/4602 (2013.01); H05K 2203/0165 (2013.01); H05K 2203/085 (2013.01); H05K 2203/1469 (2013.01);
Abstract

A monitoring system for monitoring fluid in a fluid supply vessel during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor and display operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel, billing documents, usage reports, and/or resupply requests.


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