Company Filing History:
Years Active: 2004-2012
Sure, here is the article about inventor Norbert R Bowering:
Title: Norbert R Bowering: Revolutionizing EUV Light Source Components
Introduction: Norbert R Bowering, a prolific inventor based in San Diego, CA, has made significant contributions to the field of EUV light source components. With an impressive portfolio of 22 patents, Bowering has been at the forefront of developing cutting-edge technologies in this specialized area.
Latest Patents: One of Bowering's recent patents focuses on the in-situ monitoring of EUV mirrors to assess optical degradation. This innovative method involves irradiating the mirror with non-EUV light, measuring the reflected light, and estimating mirror degradation based on the measurement and a predetermined relationship between degradation and reflectivity. Additionally, Bowering has pioneered a method for preparing near-normal incidence EUV mirrors, involving precise substrate preparation and multi-layer mirror coating deposition.
Career Highlights: Norbert R Bowering is a key figure at Cymer, Inc., a leading company in the field of EUV lithography. His groundbreaking work has propelled the company to the forefront of EUV technology development, revolutionizing the way EUV light source components are produced and refurbished. Bowering's expertise and innovative spirit have been instrumental in shaping the future of EUV technology.
Collaborations: Bowering has collaborated closely with esteemed coworkers such as Igor Vladimirovich Fomenkov and Oleh V Khodykin. Together, they have contributed to pushing the boundaries of EUV technology and enhancing the performance of EUV light source components.
Conclusion: In conclusion, Norbert R Bowering's pioneering work in the field of EUV light source components has cemented his reputation as a visionary inventor. His patents and collaborations stand as a testament to his dedication to innovation and excellence in the realm of EUV technology. Bowering's contributions continue to drive advancements in the industry, setting new standards for precision and performance in EUV light source components.
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