The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 2009
Filed:
Feb. 21, 2006
Alexander I. Ershov, San Diego, CA (US);
William N. Partlo, Poway, CA (US);
Norbert Bowering, San Diego, CA (US);
Bjorn Hansson, La Jolla, CA (US);
Alexander I. Ershov, San Diego, CA (US);
William N. Partlo, Poway, CA (US);
Norbert Bowering, San Diego, CA (US);
Bjorn Hansson, La Jolla, CA (US);
Cymer, Inc., San Diego, CA (US);
Abstract
An EUV light source is disclosed that may include a laser source, e.g. COlaser, a plasma chamber, and a beam delivery system for passing a laser beam from the laser source into the plasma chamber. Embodiments are disclosed which may include one or more of the following; a bypass line may be provided to establish fluid communication between the plasma chamber and the auxiliary chamber, a focusing optic, e.g. mirror, for focusing the laser beam to a focal spot in the plasma chamber, a steering optic for steering the laser beam focal spot in the plasma chamber, and an optical arrangement for adjusting focal power.