The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 29, 2008
Filed:
Dec. 27, 2006
I. Roger Oliver, Gisborne, NZ;
William N. Partlo, Poway, CA (US);
Igor V. Fomenkov, San Diego, CA (US);
Alexander I. Ershov, San Diego, CA (US);
Norbert Bowering, San Diego, CA (US);
John Viatella, San Diego, CA (US);
David W. Myers, Poway, CA (US);
I. Roger Oliver, Gisborne, NZ;
William N. Partlo, Poway, CA (US);
Igor V. Fomenkov, San Diego, CA (US);
Alexander I. Ershov, San Diego, CA (US);
Norbert Bowering, San Diego, CA (US);
John Viatella, San Diego, CA (US);
David W. Myers, Poway, CA (US);
Cymer, Inc., San Diego, CA (US);
Abstract
An apparatus and method is described which may comprise a plasma produced extreme ultraviolet ('EUV') light source multilayer collector which may comprise a plasma formation chamber; a shell within the plasma formation chamber in the form of a collector shape having a focus; the shell having a sufficient size and thermal mass to carry operating heat away from the multilayer reflector and to radiate the heat from the surface of the shell on a side of the shell opposite from the focus. The material of the shell may comprise a material selected from a group which may comprise silicon carbide, silicon, Zerodur or ULE glass, aluminum, beryllium, molybdenum, copper and nickel. The apparatus and method may comprise at least one radiative heater directed at the shell to maintain the steady state temperature of the shell within a selected range of operating temperatures.