Nirasaki, Japan

Nobuyuki Okayama



Average Co-Inventor Count = 4.8

ph-index = 7

Forward Citations = 613(Granted Patents)


Location History:

  • Tokyo, JP (1998)
  • Nirasaki, JP (2002 - 2010)
  • Miyagi, JP (2016)
  • Hyogo, JP (2016)
  • Amagasaki, JP (2021)

Company Filing History:


Years Active: 1998-2021

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12 patents (USPTO):Explore Patents

Title: Nobuyuki Okayama: Innovator in Semiconductor Manufacturing Technologies

Introduction

Nobuyuki Okayama, based in Nirasaki, Japan, is a prominent inventor known for his contributions to semiconductor manufacturing technologies. With a remarkable portfolio of 12 patents, Okayama continues to enhance the efficiency and effectiveness of plasma processing equipment, demonstrating his expertise in this critical field.

Latest Patents

One of Okayama's latest innovations is the "Manufacturing Method of Sample Table." This patent outlines a process designed to hold semiconductor wafers during plasma treatments. The method involves preparing an adsorption plate with a refined contact surface that properly holds the wafer, and a supporting substrate that ensures accurate adherence, thereby improving manufacturing precision.

Additionally, he developed a patent for a "Shower Head, Plasma Processing Apparatus and Plasma Processing Method." This invention features a sophisticated gas supply unit equipped with a series of gas supply paths and diffusion spaces. Such a design facilitates efficient gas distribution during plasma processes, enhancing the overall effectiveness of plasma treatment technology.

Career Highlights

Nobuyuki Okayama is associated with Tokyo Electron Limited, a leading company in the semiconductor manufacturing sector. His work at Tokyo Electron involves developing advanced manufacturing methods that are vital for modern semiconductor production. With a focus on innovation, he has consistently pushed the boundaries of what's achievable within this technology.

Collaborations

Throughout his career, Okayama has collaborated with esteemed colleagues, including Hidehito Saegusa and Jun Ozawa. These partnerships have contributed significantly to the successful development of new technologies and have fostered a collaborative environment that promotes innovation.

Conclusion

Nobuyuki Okayama stands out as a key figure in the field of semiconductor manufacturing. His inventive contributions not only advance technology but also set a foundation for future innovations within the industry. Through his work at Tokyo Electron Limited and collaboration with talented individuals, Okayama continues to inspire innovation and drive progress in semiconductor technologies.

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