The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 2007
Filed:
Apr. 07, 1998
Nobuyuki Okayama, Nirasaki, JP;
Hidehito Saegusa, Yamanashi-ken, JP;
Jun Ozawa, Yamanashi-ken, JP;
Daisuke Hayashi, Yamanashi-ken, JP;
Naoki Takayama, Kofu, JP;
Koichi Kazama, Nirasaki, JP;
Nobuyuki Okayama, Nirasaki, JP;
Hidehito Saegusa, Yamanashi-ken, JP;
Jun Ozawa, Yamanashi-ken, JP;
Daisuke Hayashi, Yamanashi-ken, JP;
Naoki Takayama, Kofu, JP;
Koichi Kazama, Nirasaki, JP;
Tokyo Electron Limited, Tokyo-To, JP;
Abstract
A processing system has an upper electrode with gas discharge holes of a shape corresponding to the external we of insulating members. The insulating members are formed of a poly(ether etherketone) resin, a polyimide resin, a poly (ether imide) resin or the like. Each insulating member has a step at its outer surface and an internal longitudinal through hole tapered to expand toward the processing chamber. The insulating members are pressed in the gas discharge holes to bring the steps into contact with shoulders formed in the sidewalls of the gas discharge holes. A part of each insulating member, as fitted in the gas discharge hole, projects from a surface of the upper electrode that faces a susceptor.