Location History:
- Amagasaki-shi, JP (2007)
- Amagasaki, JP (2011 - 2012)
- Nirasaki, JP (2017 - 2024)
Company Filing History:
Years Active: 2007-2025
Title: Nobuhiko Yamamoto: Innovator in Plasma Processing Technology
Introduction
Nobuhiko Yamamoto is a prominent inventor based in Nirasaki, Japan. He has made significant contributions to the field of plasma processing, holding a total of 9 patents. His work focuses on advancing technologies that utilize plasma for various applications.
Latest Patents
Yamamoto's latest patents include a plasma processing method and a plasma processing apparatus. The plasma processing method involves a chamber equipped with a stage for substrate placement, multiple radiating devices for electromagnetic wave emission, and a dielectric window positioned between the radiating devices and the stage. The method entails preparing the substrate, controlling the phase of the electromagnetic waves, radiating these waves into the chamber, and processing the substrate using localized plasma generated from a supplied gas. The plasma processing apparatus consists of a processing container, a substrate holder, a dielectric window, and a series of phased array antennas designed to irradiate electromagnetic waves.
Career Highlights
Yamamoto is associated with Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His innovative work has positioned him as a key figure in the development of plasma processing technologies.
Collaborations
Some of his notable coworkers include Taro Ikeda and Eiki Kamata, who have collaborated with him on various projects related to plasma technology.
Conclusion
Nobuhiko Yamamoto's contributions to plasma processing technology have been instrumental in advancing the field. His innovative patents and collaborations reflect his commitment to enhancing technological capabilities in this area.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.