logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9702913 B1

PDFFull Text
Date of Patent:
Jul. 11, 2017

Filed:

Jun. 11, 2013

Acquisition method for s-parameters in microwave introduction modules, and malfunction detection method

Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventors:

Taro Ikeda, Nirasaki, JP;

Yutaka Fujino, Nirasaki, JP;

Hikaru Adachi, Nirasaki, JP;

Hiroyuki Miyashita, Nirasaki, JP;

Yuki Osada, Nirasaki, JP;

Nobuhiko Yamamoto, Nirasaki, JP;

Assignee:

TOKYO ELECTRON LIMITED, Tokyo, JP;

Attorneys:

Nath, Goldberg & Meyer

Jerald L. Meyer

Primary Examiner:

Farhana Hoque

Int. Cl.
CPC ...
G01R 31/02 (2006.01); C23F 1/00 (2006.01); G01R 27/06 (2006.01); H05H 1/46 (2006.01); H01J 37/32 (2006.01); G01R 27/28 (2006.01);
U.S. Cl.
CPC ...
G01R 27/06 (2013.01); G01R 27/28 (2013.01); H01J 37/321 (2013.01); H01J 37/32192 (2013.01); H01J 37/32926 (2013.01); H05H 1/46 (2013.01); H05H 2001/463 (2013.01); H05H 2001/4682 (2013.01);
Abstract

A plasma processing apparatus () includes a processing container () and a microwave introduction device () having a plurality of microwave introduction modules (). A microwave is introduced for each of the plurality of microwave introduction modules (), and S-parameters for each of combinations of the plurality of microwave introduction modules () are obtained based on the introduced microwave and a reflected microwave reflected from the processing container () into the plurality of microwave introduction modules ().

Find Patent Forward Citations

Ikeda, Taro. (2017). Acquisition method for s-parameters in microwave introduction modules, and malfunction detection method (U.S. Patent No. 9702913). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9702913

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…