Company Filing History:
Years Active: 1987-2002
Title: Noboru Tokumasu: Innovations in Semiconductor Technology
Introduction
Noboru Tokumasu is a distinguished inventor based in Tokyo, Japan, known for his significant contributions to the field of semiconductor technology. With a remarkable portfolio of 23 patents, he has played a pivotal role in advancing methods for manufacturing semiconductor devices.
Latest Patents
Two of Noboru Tokumasu's latest patents highlight his innovative work in semiconductor manufacturing. The first patent, titled "Method for forming an interlayer insulating film and semiconductor device," outlines a comprehensive process that begins with forming a metal film on a substrate. It details the creation of a first insulating film, followed by a series of precision etching steps that culminate in the formation of a second insulating film, enhancing the performance and reliability of semiconductor devices.
His second patent, “Film forming method and manufacturing method of semiconductor device,” describes a method for producing a flattened interlayer insulating film. This invention involves preparing a deposition gas that includes an inert gas combined with silicon and phosphorus compounds, leading to the formation of a silicon-containing insulating film on the substrate. Together, these patents demonstrate his expertise in optimizing semiconductor device construction.
Career Highlights
Noboru Tokumasu has achieved considerable recognition in his profession. His career includes working at Semiconductor Process Laboratory Co., Ltd., where he focused on innovative semiconductor manufacturing processes. He also contributed his expertise to Canon Sales Co., Inc., further expanding his experience and impact in the industry.
Collaborations
Throughout his career, Noboru has collaborated with notable professionals such as Kazuo Maeda and Yuko Nishimoto. These partnerships have fostered an environment of innovation, pushing the boundaries of current technological capabilities in the semiconductor arena.
Conclusion
Noboru Tokumasu's contributions to the field of semiconductor technology through his patents and collaborations signify a commitment to innovation and excellence. His cutting-edge methods in semiconductor manufacturing continue to inspire advancements within the industry, reflecting his significant role as an inventor and leader in technological development.