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For the Inventor, By the Inventor

Beaverton, OR, United States of America

Nick Ray Linebarger, Jr

This inventor holds 15 USPTO granted patents and 14 published patent applications. Top assignee: Lam Research Corporation. Active years: 2017-2026.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Nick Ray Linebarger, Jr. Retrieved from https://idiyas.com/inventor/nick-ray-linebarger-jr

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

USPTO Granted Patents = 15 

% Patents Active = 86.7

Average Co-Inventor Count = 3.0

ph-index = 3

Forward Citations = 26(Granted Patents)


Company Filing History:

goldMedal15 out of 3,945 
 
Lam Research Corporation
 patents

Years Active: 2017-2026

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15 patents (USPTO):Explore Patents
1. 12738459 - In situ surface coating of process chamber (2026-09-15),
2. 12736132 - Multi-layer and multi-ringed seals for preventing permeation and leak-by of fluid (2026-09-15),
3. 12539569 - Grouping features of showerheads in substrate processing systems (2026-02-03),
4. 12398464 - Substrate pedestal including backside gas-delivery tube (2025-08-26),
5. 12338531 - Spatially tunable deposition to compensate within wafer differential bow (2025-06-24),
6. 12272591 - Friction stir welding in semiconductor manufacturing applications (2025-04-08),
7. 12050112 - Distance measurement between gas distribution device and substrate support at high temperatures (2024-07-30),
8. 11946142 - Spatially tunable deposition to compensate within wafer differential bow (2024-04-02),
9. 11634817 - Substrate pedestal including backside gas-delivery tube (2023-04-25),
10. 11408734 - Distance measurement between gas distribution device and substrate support at high temperatures (2022-08-09),
11. 10903070 - Asymmetric wafer bow compensation by chemical vapor deposition (2021-01-26),
12. 10872747 - Controlling showerhead heating via resistive thermal measurements (2020-12-22),
13. 10655225 - Substrate pedestal module including backside gas delivery tube and method of making (2020-05-19),
14. 10242848 - Carrier ring structure and chamber systems including the same (2019-03-26),
15. 9738975 - Substrate pedestal module including backside gas delivery tube and method of making (2017-08-22),

Title: Nick Ray Linebarger, Jr: Innovator in Semiconductor Processing Technology

Introduction

Nick Ray Linebarger, Jr. is a prominent inventor based in Beaverton, OR (US), known for his significant contributions to semiconductor processing technology. With a total of 15 patents to his name, he has made a notable impact in the field through his innovative designs and solutions.

Latest Patents

Among his latest patents is a substrate pedestal that includes a backside gas-delivery tube. This semiconductor substrate processing apparatus features a vacuum chamber with a processing zone, a process gas source, and a showerhead module. The substrate pedestal module is designed with a ceramic platen that supports a semiconductor substrate during processing, along with a ceramic stem and a backside gas tube that supplies gas to enhance processing efficiency. Another notable patent involves spatially tunable deposition to compensate for within-wafer differential bow. This plasma processing chamber is equipped with a showerhead pedestal that allows for the deposition of different films on the underside surface of a wafer, showcasing his innovative approach to semiconductor manufacturing.

Career Highlights

Nick Ray Linebarger, Jr. is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work focuses on advancing technologies that improve the efficiency and effectiveness of semiconductor processing.

Collaborations

Throughout his career, Linebarger has collaborated with talented individuals such as Troy Alan Gomm and Fayaz A Shaikh, contributing to the development of cutting-edge technologies in the semiconductor field.

Conclusion

Nick Ray Linebarger, Jr. continues to be a driving force in semiconductor innovation, with his patents reflecting his expertise and commitment to advancing technology. His contributions are vital to the ongoing evolution of semiconductor processing.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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