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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12272591 B1

PDFFull Text
Date of Patent:
Apr. 08, 2025

Filed:

Mar. 12, 2020

Friction stir welding in semiconductor manufacturing applications

Applicant:

Lam Research Corporation, Fremont, CA (US);

Inventors:

Nick Ray Linebarger, Jr., Beaverton, OR (US);

Prahalad Narasinghdas Agarwal, Bangalore, IN;

Ravikumar Sadashiv Patil, Bengaluru, IN;

Damodar Rajaram Shanbhag, Tualatin, OR (US);

Assignee:

Lam Research Corporation, Fremont, CA (US);

Attorney:

Weaver Austin Villeneuve & Sampson LLP

Primary Examiner:

Hung D Nguyen

Int. Cl.
CPC ...
H01L 21/687 (2006.01); B23K 20/12 (2006.01); H01L 21/67 (2006.01); B23K 101/40 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68785 (2013.01); B23K 20/1255 (2013.01); B23K 20/129 (2013.01); H01L 21/67103 (2013.01); H01L 21/68757 (2013.01); B23K 2101/40 (2018.08);
Abstract

In an example, a showerhead pedestal assembly for a substrate processing chamber is provided. The showerhead pedestal assembly includes a faceplate. A platen is disposed within the faceplate and includes a heater element extending through at least one groove in the faceplate. The at least one groove is profiled to accept at least one portion of the heater element. A periphery of the platen is joined to an interior surface of the faceplate by a friction stir welded joint.

Find Patent Forward Citations

Linebarger, Jr., Nick. (2025). Friction stir welding in semiconductor manufacturing applications (U.S. Patent No. 12272591). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12272591

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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