The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 08, 2025
Filed:
Mar. 12, 2020
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
Nick Ray Linebarger, Jr., Beaverton, OR (US);
Prahalad Narasinghdas Agarwal, Bangalore, IN;
Ravikumar Sadashiv Patil, Bengaluru, IN;
Damodar Rajaram Shanbhag, Tualatin, OR (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/687 (2006.01); B23K 20/12 (2006.01); H01L 21/67 (2006.01); B23K 101/40 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68785 (2013.01); B23K 20/1255 (2013.01); B23K 20/129 (2013.01); H01L 21/67103 (2013.01); H01L 21/68757 (2013.01); B23K 2101/40 (2018.08);
Abstract
In an example, a showerhead pedestal assembly for a substrate processing chamber is provided. The showerhead pedestal assembly includes a faceplate. A platen is disposed within the faceplate and includes a heater element extending through at least one groove in the faceplate. The at least one groove is profiled to accept at least one portion of the heater element. A periphery of the platen is joined to an interior surface of the faceplate by a friction stir welded joint.