Tualatin, OR, United States of America

Damodar Rajaram Shanbhag

USPTO Granted Patents = 9 

Average Co-Inventor Count = 4.1

ph-index = 3

Forward Citations = 30(Granted Patents)


Location History:

  • Tualatin, OR (US) (2018 - 2021)
  • Beaverton, OR (US) (2022 - 2024)

Company Filing History:


Years Active: 2018-2025

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9 patents (USPTO):

Title: The Innovative Contributions of Damodar Rajaram Shanbhag

Introduction

Damodar Rajaram Shanbhag is a notable inventor based in Tualatin, Oregon, with a significant portfolio of innovations in semiconductor manufacturing. He holds a total of 9 patents, showcasing his expertise and commitment to advancing technology in this critical field.

Latest Patents

Shanbhag's latest patents include groundbreaking work in friction stir welding and ex situ coating processes. One of his notable inventions is a friction stir welding technique applied in semiconductor manufacturing applications. This invention features a showerhead pedestal assembly for a substrate processing chamber, which includes a faceplate and a platen with a heater element. The innovative design allows for a friction stir welded joint that enhances the assembly's performance.

Another significant patent focuses on the ex situ coating of chamber components for semiconductor processing. This method involves forming a protective coating through an atomic layer deposition process, which offers numerous advantages over traditional coating methods. The protective coating, which may consist of materials like aluminum oxide and yttrium oxide, helps reduce contamination on wafers and stabilizes processing conditions, leading to consistent results across multiple batches.

Career Highlights

Shanbhag is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work at Lam Research has positioned him as a key contributor to advancements in semiconductor manufacturing technologies.

Collaborations

Throughout his career, Shanbhag has collaborated with talented individuals such as Guangbi Yuan and Thadeous Bamford. These partnerships have fostered innovation and have been instrumental in the development of his patented technologies.

Conclusion

Damodar Rajaram Shanbhag's contributions to semiconductor manufacturing through his patents and collaborations highlight his role as a significant inventor in the field. His innovative approaches continue to influence the industry and pave the way for future advancements.

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