Location History:
- Tsukuba, JP (2012)
- Moriya, JP (2021 - 2023)
Company Filing History:
7 out of 303 
1 out of 1,714 
1 out of 2 Years Active: 2012-2025
Title: Naoto Kameda: Innovator in Oxide Film Formation Technology
Introduction
Naoto Kameda is a prominent inventor based in Moriya, Japan. He has made significant contributions to the field of oxide film formation, holding a total of 8 patents. His innovative approaches have advanced the technology used in various industrial applications.
Latest Patents
Kameda's latest patents include an oxide film formation method that utilizes atomic layer deposition (ALD) techniques. This method involves forming a first film on a film formation surface using an ALD first film formation method that employs at least 80 volume % ozone gas as an oxidizing agent. A second film is then formed on the first film surface using a different method, which utilizes OH radicals generated from a reaction between high-concentration ozone gas and unsaturated hydrocarbon gas. This innovative approach enhances the oxidizing power of the radicals to create a high-quality oxide film.
Another notable patent is for an atomic layer deposition device and method. This device features a shower head positioned opposite the film formation surface of a target workpiece. It includes raw material gas ejection ports and OH* forming gas ejection ports arranged alternately. The design allows for efficient oxide film formation by ejecting raw material gases and ozone gas in a coordinated manner while moving the target workpiece.
Career Highlights
Throughout his career, Naoto Kameda has worked with esteemed organizations such as Meidensha Corporation and the National Institute of Advanced Industrial Science and Technology. His work in these institutions has allowed him to refine his expertise in film formation technologies and contribute to groundbreaking advancements in the field.
Collaborations
Kameda has collaborated with notable colleagues, including Toshinori Miura and Mitsuru Kekura. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.
Conclusion
Naoto Kameda's contributions to oxide film formation technology have established him as a leading inventor in his field. His innovative patents and career achievements reflect his dedication to advancing industrial applications through cutting-edge technology.