The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 24, 2023
Filed:
Aug. 09, 2019
Applicant:
Meidensha Corporation, Tokyo, JP;
Inventors:
Assignee:
MEIDENSHA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/40 (2006.01); C01B 21/082 (2006.01); C01B 33/12 (2006.01); C08J 7/06 (2006.01); C23C 16/30 (2006.01); C23C 16/455 (2006.01);
U.S. Cl.
CPC ...
C23C 16/401 (2013.01); C01B 21/0823 (2013.01); C01B 33/126 (2013.01); C08J 7/06 (2013.01); C23C 16/308 (2013.01); C23C 16/45565 (2013.01); C08J 2329/04 (2013.01); C08J 2339/06 (2013.01);
Abstract
Disclosed is a degradable film () in which a barrier layer () is disposed on a surface of a water-soluble polymer layer (). The water-soluble polymer layer () is made of a water-soluble polymer such as polyvinyl alcohol or polyvinyl pyrrolidone. The barrier layer () is made of silicon oxide or silicon oxynitride. The barrier layer () is formed on the water-soluble polymer layer () by a CVD process with the supply of a raw material gas containing a precursor of a substance that forms the barrier layer (), an ozone gas with an oxygen concentration of 20 vol % or higher and an unsaturated hydrocarbon gas to the water-soluble polymer layer ().