Moris Kori

Title: The Innovative Contributions of Moris Kori in Tungsten Material Technologies

Introduction

Moris Kori, a prominent inventor based in Palo Alto, California, has made significant strides in the field of material science through his innovative patents. With a total of 21 patents to his name, he has established himself as a leading figure in the development of tungsten materials and processes that enhance manufacturing technologies.

Latest Patents

Moris Kori's latest patents showcase his expertise in vapor deposition processes for tungsten materials. One of his notable patents is titled "Method for forming tungsten materials during vapor deposition processes." This invention outlines a method that involves positioning a substrate within a deposition chamber, heating it to an optimal temperature, and sequentially exposing it to diborane and a tungsten precursor gas, ultimately forming a tungsten nucleation layer through an atomic layer deposition (ALD) process. Furthermore, this patent describes the subsequent exposure of the substrate to a deposition gas, combining hydrogen and tungsten precursor gases to create a tungsten bulk layer during a chemical vapor deposition (CVD) process. This innovative approach allows for ALD and CVD processes to occur within the same or different deposition chambers.

Another of his significant patents, "Method for depositing tungsten-containing layers by vapor deposition techniques," presents a method for forming tungsten-containing layers. This process involves sequentially exposing a substrate to both a processing gas and a tungsten-containing gas during ALD. The processing gas includes boron and nitrogen, followed by the formation of a tungsten bulk layer using the tungsten-containing gas and a reactive precursor gas during CVD. This method enhances the efficiency and quality of tungsten deposition, proving beneficial for various applications.

Career Highlights

Moris Kori works at Applied Materials, Inc., where he applies his knowledge and skills to further advance material technologies. His extensive background and pioneering work in vapor deposition processes have been crucial in the company’s innovations, particularly in semiconductor manufacturing and material sciences.

Collaborations

Throughout his career, Kori has collaborated with notable professionals in his field. He has worked alongside Alfred W. Mak and Ashok K. Sinha, both of whom have also made substantial contributions to the research and development of materials and processes in the semiconductor industry. These collaborations have fostered an environment of innovation and have led to impactful advancements in tungsten material technologies.

Conclusion

Moris Kori's contributions to the field of tungsten materials through his patents illustrate the importance of innovation in advancing technology. His methods for vapor deposition not only improve the efficiency of manufacturing processes but also set new standards in material science. As he continues to collaborate with leading professionals, the potential for future breakthroughs in this domain remains promising.