Mirko Vukovic

Title: Mirko Vukovic: Innovator and Patent Holder in Substrate Processing Technologies

Introduction

Mirko Vukovic, a prominent inventor residing in Slingerlands, NY, has made significant contributions to substrate processing technologies. With an impressive portfolio of 27 patents, Vukovic's innovations focus on enhancing efficiency and effectiveness in coating and processing substrates.

Latest Patents

Among Vukovic's latest inventions are two notable patents that reflect his expertise and innovative spirit:

1. **Apparatus and Methods for Beam Processing of Substrates** - This patent describes a substrate processing system that includes a processing chamber and a substrate holder designed to hold and rotate a substrate. It features an electron emitter that directs a first electron beam at a peripheral region of the substrate, with sufficient energy to vaporize material from the substrate's surface. The system also comprises an airflow mechanism to direct gas across the substrate surface and an exhaust system to collect the vaporized materials.

2. **Apparatus and Method for Spin Processing** - This invention outlines equipment for coating a wafer. It includes a wafer holder, rotary drive, and a nozzle for applying liquid to the wafer's surface. Additionally, the apparatus contains an annular duct to collect ejected material and an air knife designed to blow an air curtain onto the backside of the wafer, facilitating a more efficient coating process.

Career Highlights

Mirko Vukovic has established his career at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His role has enabled him to collaborate on groundbreaking technologies that propel advancements in substrate processing.

Collaborations

Throughout his career, Vukovic has worked alongside other skilled professionals, including Derrek Andrew Russell and John Stephen Drewery. Their collaborative efforts have significantly contributed to the success of various projects within the company, enhancing innovation in the field.

Conclusion

Mirko Vukovic stands out as a key innovator in substrate processing, with a remarkable record of inventions that showcase his dedication to progress. His work not only exemplifies the spirit of innovation but also serves as a foundation for future developments in the industry. As technology continues to evolve, Vukovic's contributions will undoubtedly have a lasting impact on substrate processing technologies.